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Temperature Chuck Systems

ATT Systems GmbH specializes in cold chuck and hot chuck temperature systems for wafer probers such as CPS/Electroglas, Accretech, and Tokyo Electron. Thermal systems come in a variety of specifications that utilize air or liquid as the cooling medium with the same controller being used for either specification. Utilizing many of the same components when heat dissipation requirements change,  ATT Systems temperature chucks help to maximize uptime and keeps equipment costs low.

ATT Systems offers a wide range of extremly reliable, high-performance temperature control systems for the semiconductor industry.  ATT Systems thermal chucks are modular in concept for convenient cost-effective system upgrades, easy customization, and the safest investment.

ATT Systems sources the best available components for our products and uses the most advanced manufacturing technology. ATT Systems products are designed for exceptional thermal and mechanical stability and precision.

- 30°C to +400°C

The A-Series, an active air cooled chuck system in the price range of Hot Chucks at a competitive price.

- 60°C to +300°C

The C-Series, air cooled high end systems combining very low and high temperatures within one chuck system

- 65°C to +300°C

The M-Series also with an extremely wide temperature range, liquid cooled for high power applications

- 65°C to +150°C

The ultra fast P-Series for very low temperatures with exceptional cooling rates

ATT Systems chucks are designed for all major prober systems, like CPS/Electroglas, TSK Accretech, TEL, Suss Microtec, Cascade, Wentworth, etc.

Additonally, ATT Systems develops solutions for 4-inch and 6-inch wafer test and specific systems for testing electronic components, hybrids, PCBs or other assemblies at the tester site, wafer prober, or for other unique applications.